Decomposition of NF3 Gas (greenhouse gas) using an Electron-beam with Additive Gases
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Citation
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1
Estimation of Nitrogen Trifluoride (NF3) Emissions and Future Management Strategies in South Korea's Semiconductor and Display Industries / 2024 / Journal of Korean Society of Environmental Engineers / vol.46, no.5, pp.205 /
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Mineralization of SF6 and NF3 fluorinated compounds for greenhouse gas abatement by oxalates / 2024 / Chemosphere / vol.358, no., pp.142186 /